Image: Process Chamber Assurance tool. Designed to test pressure sensors, mass flow controllers, pump
performance, and chamber integrity.
CAT is used primarily for:
- Performance monitoring of process
tool components to prevent unscheduled down time and maintenance
- Fingerprinting of high yield
process tools for system matching with like tools
- Brining new and down systems
online and into specification
- Baselining tools before starting a run
Key Features:
- A small foot print for easy
maneuverability around the fab.
- NIST traceable independent
reference which may easily be moved from one tool to another.
- Windows based easy to use
graphical software.
- Four security levels of operators
allowing administrators and engineers to design test and operators to run the test
unassisted.
- IN-SITU analysis meaning that the
tools are tested in their actual running environment with all the system sensors, MFCs and electronics in
place.
- Pressure sensor noise, quality,
calibration and zeroing test
- Pump speed, speed at a given
pressure and time to base test
- Volume measurement, leak-up
rate
- Mass Flow Controller linearity,
gain and offset over a defined range
- MFC setpoint performance tests
mean flow, time to control, control deviation, maximum flow, and rate of rise.
- Residual Gas Analysis (optional)
User Friendly Features;
Windows Software
Interface:
The control software operates under Windows 95 (or Windows98). Cue
cards and help screens navigate operators through the test procedures making testing a simple operation. A
great deal of flexibility allows engineers to design the full array of test or focus on one area of
concern.
Security;
The CAT software features four levels of security. Operators may
run all of the configured test. Service security level users may run tests and view configurations to assure
the CAT is working properly. Engineer level users may define the test specifications for each process tool
and components. Finally, the owner has full access to all controls including defining the security levels of
the other users.
System Status
The status view displays the active system with the components
presently under test. Graphic representations of gas flows and valves opening provide a birds eye view of the
overall configuration. Setting up configurations for multiple process chambers is made simple by the
pre-loaded defaults and copy configuration features. Each CAT system comes pre-loaded with factory
specifications for most MFCs and manometer types. Selecting the model number automatically loads the default
settings. Also, once a process system's configuration is completed, copying the configuration for like
process systems is just a couple of mouse clicks away.
Mechanical Features
The CAT has four swivel wheels t assure easy movement into corners
and narrow race ways. The small foot print of 20" by 24" adds to maneuverability. A utility drawer provides a
great place for storing cables, adapters and spare components. A retractable power cord and flexcoil
reference connections prevent unwanted cables dragging behind when moving from process. Stainless steel skins
ensure class 1 clean room compliance.
Performance Specifications:
Pressure Sensor
(specified for 10 Torr Reference)
- Pressure Sensor Zero Offset to
within 1 mTorr
- Pressure Sensor Slope Errors to
within +0.5%
- Pressure Sensor Linearity Deviation to within 2
mTorr
Chamber Leak Rate
- Actual Rate of Rise to better than 1
mTorr/minute
Pumping Performance
- Measurement of pumping speed over
a user defined range
- Defined pump-down to target within
1 second
- Base pressure to within 1
mTorr
Mass Flow Controller
- Average Flow rate to within +0.5%
FSR
- Time to come into controlled flow
to within 1 second
- RMS deviation from average flow
rate
- Graphical display of real time
flow information & analysis
- Zero offset to <+0.5%
FSR
- Gain to <0.5%
FSR
- Linearity to <0.5%
FSR
General
- Repeatability is better than 1%
(typically 0.1%). Test results are correctly compensated for system temperature and leak rate where
applicable
- Depending on the configuration,
the CAT will characterize equipment from 1x10-4 Torr to 100 Torr
- Dimensions: which 29.25",depth 26", height
52"
To see the full product range available and individual product data sheets, please click
on the link;
Lucas Labs CAT
tool
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