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Wafer Processing Equipment includes both acid and solvent stations for cleaning,
etching, stripping and lift-off applications. Our wet benches can be configured
for either manual or automated transfer, utilizing PLC controls and rotary or
linear transfer arms. As an environmentally friendly alternative to the standard
exhausted workstation design, our 300CLV is an automated, closed-loop stripping
and lift-off tool
Exhausted Workstation
(EWS) Exhausted Workstation (EWS) is a modular workstation designed
to operate in a cleanroom. This station style is available in plastic or
stainless steel construction.
Fumehood
Workstation JST's Fumehood Workstation is modular in design and made to
provide an operator safe environment when working with volatile chemistries.
Stainless Steel or Plastics construction available.
Semi-Automated Rotary
Transfer Arm JST's semi-automated rotary transfer arm is designed for
two, three, or four-step chemical processes. The system is designed to be used
inside JST's Exhausted Workstation (EWS) or Fumehood shells.
Automated Linear
Transfer Arm JST's automated linear transfer is designed for processes
using more than three baths. The transfer system can be used for single or
multi-tasking: allowing for the programming of multiple simultaneous process
functions.
Chemical Process
Baths Process baths are configured to your specific application with
options for heat, recirculation, agitation, size and construction
materials.
Quick Dump
Rinser JST's Quick Dump Rinser (QDR) ensures effective DI water rinsing
of chemistries and particulates from the product surface via a combination of
spray, cascade overflow, and quick dump features.
Ultrasonic
Baths JST's ultrasonic baths are designed to optimize the effectiveness
of your cleaning chemistry through the scrubbing action of high frequency sound
waves.
300CLV Stripping
Tool JST's 300CLV is a completely self contained, dry-to-dry unit
designed for batch stripping of semiconductor wafers and integrated
circuits.
CLV Dryer JST's
CLV Dryer is a patented, environmentally friendly, ultra-clean drying
technology. The CLV is a hybrid of two proven technologies, vacuum and IPA
(isopropyl alcohol) drying, utilizing the best features of both in an effective
closed-loop process.
Clean Room:
Quartz Tubewash
JST's Quartz Tubewash Station is used for etching and
washing of quartz tubes and miscellaneous quartz components.
Teardown Workstation
JST's Teardown Workstation is designed to be used as a
utility workstation for manual cleaning of CVD parts or other parts containing a
buildup of toxic residue.
HEPA Hot Air Dryer
JST's HEPA Dryer is available either as a stand-alone dryer
or as a module in our workstations.
Infrared Dryer
Infrared heating elements are built into a drying chamber
to absorb moisture from products. This technology is excellent for drying
Quartzware.
Carts
JST designs and manufactures a wide variety of carts that
enhance cleanroom efficiency.
Cabinets
We design and manufacture cabinets for every cleanroom
purpose, from dessicators to pass-throughs to storage units.
Precision Cleaning
100 Ultrasonic Cleaner
JST's 100 Ultrasonic Cleaner is a cost effective, automated
ultrasonic parts cleaner.
300 Ultrasonic Cleaner
JST's 300 Ultrasonic Precision Cleaner is a self contained,
fully automated roll in unit designed for critical cleaning of sensitive parts.
300 CLV Cleaning and Stripping Tool
JST's 300CLV is a completely self contained, dry-to-dry
unit designed for cleaning and stripping wafers, optics, flat panels, disk
drives, and other delicate parts.
Ultrasonic Baths
JST's ultrasonic baths are designed to optimize the
effectiveness of your cleaning chemistry through the scrubbing action of high
frequency sound waves.
If
you require any more information please Contact Us
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